Abstract

We present our results to improve ion beam assisted deposition (IBAD) of magnesia (MgO) templates for subsequent YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// (YBCO) deposition. The substrate surface roughness has a significant effect on the initial nucleation texture of IBAD MgO films. We have found that reduction in our substrate surface roughness to /spl sim/ 3.5 nm has resulted in better in-plane texture for IBAD MgO films than those deposited on rougher metal substrates. We have further improved the IBAD MgO deposition parameters by using an in situ reflected high-energy electron diffraction (RHEED) analysis tool that allows for monitoring of IBAD MgO growth. We have found a direct correlation between the RHEED generated intensity versus time curve and in-plane texture. Utilizing X-ray diffraction analysis, we have been able to determine the optimum deposition parameters to routinely grow films in batch mode that have a phi scan /spl Delta//spl phi/ from 6 - 7/spl deg/. Coupling the improvements in substrate preparation with optimization of IBAD MgO deposition has allowed for both batch and continuous deposition (termed c-IBAD MgO) on metallic substrates that result in superior superconducting properties. We have demonstrated that deposited meter lengths have had phi scan FWHM values from 8 - 9/spl deg/ with /spl plusmn/ 10% uniformity. Additionally, we have been able to widen the processing zone in our system and coat two, one-meter lengths simultaneously while preserving good texture quality (/spl Delta//spl phi//sub ave/ /spl sim/ 8/spl deg/) and uniformity (60 - 80% of tape length within /spl plusmn/ 5% of /spl Delta//spl phi//sub ave/) for both tapes.

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