Abstract
Ta and C ions extracted from a metal vapor vacuum arc ion source were implanted into H21 steel, with an implantation dose of 3 × 1017 cm-2, extraction acceleration 42 kV, and average ion beam flux about 40 μA·cm-2. Rutherford backscattering spectrum was used to measure the surface composition after Ta or Ta+C implantation. Observation of phase induced by Ta and C implantation was carried out by x-ray diffraction analysis. Experimental results showed that the wear rate of the implanted layer dropped 30% for Ta ion implantation and by a factor of 2.5 for Ta+C dual ion implantation. Thus Ta+C dual ion implantation was found to significantly reduce the friction coefficient of H21 steel. The wear mechanisms of the implanted layer were discussed.
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