Abstract
High-efficiency coupling of stacked multifiber tapes to a vertical-cavity surface-emitting laser (VCSEL) array is demonstrated. Three fiber tapes, each of which includes four multimode fibers, are coupled to a 4 ×3 VCSEL array simply by inserting fibers into guiding holes fabricated on the back side of the substrate. Mirrorlike smooth floors of the holes are formed by electron cyclotron resonance reactive ion beam etching, which results in great improvement of coupling efficiency. The average measured coupling efficiency is 81.3%.
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