Improved treatment of home-made glow discharge ion source

Abstract

For a better treatment, a new class of DC ion source (DCIS) was developed and adapted to provide low-power, highly-density plasma and ion-current applications. Such an ion source operates under the mode of abnormal glow discharge being of the self-extraction category, with specific features such as simple operation, stable discharge, and the ability to use for a variety of plasma, ion, and electron beam applications. A teflon disc with different diameters has been installed in between the two electrodes. This disc covered the cathode area, reducing the discharge area on the cathode surface for discharge confinement, and thus allowing for a higher output ion beam current. Pressures of 10−4 mbar, a 3 mm gap between the electrodes, and a 5 mm teflon diameter were observed to be the optimal operating conditions. At this ideal distance, hydrogen, nitrogen, and argon gases were used to investigate internal and external operational parameters. Finally, the Paschen curves were determined for hydrogen, air, as well as nitrogen gases.