Improved phase-to-height mapping method combine with device attitude

Abstract

Phase-to-height mapping is one of the important processes in three dimensional phase measurement profilometry. But, in traditional phase-to-height mapping method, the measurement accuracy is affected by device attitude, so it needs saving a large amount of mapping equations to achieve high-quality phase-to-height mapping. In order to improve that, this paper proposes an improved phase-to-height mapping method combine with device attitude. Firstly, we get the unwrapped phase of the target. Then, using generalized regression neural network is used to reduce the offset of phase information at the same height due to the randomness of device attitude. Last, the phase-to-height mapping is completed by substituting the unwrapped phase (the difference between having detected object and no detected object) of eliminate the offset into improved phase-to-height mapping method. Experimental results show that the proposed method could achieve high-quality phase-to-height mapping with less mapping equation and less memory space. Compared with the nonlinear phase-to-height mapping method (probabilistic neural network to eliminate phase offset), its accuracy is improved by 44.30%. Compared with the nonlinear phase-to-height mapping method (radial basis function neural network to eliminate phase offset), the accuracy is improved by 39.58%.