Abstract

Quantum cascade laser (QCL) with porous structure is reported in this work. The porous structure is fabricated onto the wafer top surface towards the sides of the QCL waveguide by electro-chemical etching. The pore size of the porous structure is in hundreds of nanometers. Experimental results show that QCL with porous structure exhibits better beam quality. The far field of the typical 60 μm-ridge-width QCL is modulated from double-lobed shape to single-lobed shape due to the utilizing of porous structure. The full width at half maximum is 5.26°, which agrees very well with that of fundamental transverse mode. An interesting spectra behavior is also observed. The QCL with porous structure represents a temperature tuning rate of 0.49 nm/K, which is comparable to distributed feedback QCL.

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