Improved dc and microwave performance of heterojunction bipolar transistors by full sulfur passivation

Abstract

The temperature-dependent dc characteristics of InGaP∕GaAs heterojunction bipolar transistors with and without full sulfur passivation are systematically studied and demonstrated. The studied device with full sulfur passivation shows lower specific contact resistance ρC, lower sheet resistance Rsh, lower collector-emitter offset voltage ΔVCE, and higher dc gain βF than devices without sulfur passivation. The device with full sulfur passivation also exhibits better rf performance. In addition, the studied device with full sulfur treatment shows lower temperature variation coefficients of ρC,Rsh,ΔVCE, and βF. Thus, the device with sulfur treatment presents relatively temperature-independent characteristics that can extend the transistor action to higher temperature regimes.