Abstract
We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for three times increased sensitivity. Capacitive Coriolis mass flow sensors are normally read out by two electrodes that measure the ratio between the actuation mode and the Coriolis mode, which is induced by the mass flow. This ratio results in a phase shift between the two electrodes. By adding two additional read out electrodes, the actuation mode signal is partially canceled, allowing for higher sensitivity to the Coriolis mode, and thus larger phase shifts for the same mass flows. An analytical model is derived and corresponds with the measurements. It is also proven that the range and sensitivity of the sensor can be tuned by changing the size of the additional readout electrodes. This readout method does not increase the readout time.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
