Implementation of Generic Equipment Model (E30 Standard) for Semiconductor Equipment and Materials International (SEMI) automation tool

Abstract

The Semi Equipment Communication standard (SECS) defines a communication interface suitable for the exchange of messages between semiconductor processing equipment intended for wafer manufacturing, wafer processing and a host. This standard provides a means to communicate between different equipment without knowledge of their protocols. SECS is a layered protocol, which helps to understand meaning of messages between semiconductor processing element and host. Implementation of SECS standard will provide solution for making changes in automation software for complete process. This paper proposes a scientific and systematic approach to the design and development of a universal equipment interface by taking enterprise integration and cutting-edge technology requirements into consideration. In this paper, implementation of Alarm Management standard (E-30) under GEM (Generic Equipment Model for communication and control) layer is discussed. It is one of the layers of SECS Standard. GEM defines equipment behaviors and methods to communicate and control. GEM features in the equipment conforming to SEMI E30 standard. Key words: Semi Equipment Communication standard (SECS), Generic Equipment Model (GEM), Semiconductor Equipment Materials International (SEMI).