Design of AC voltage sag compensators

Abstract

AC operated electronic equipment are vulnerable to momentary losses of AC voltage, which are known as voltage sags. Voltage sags are commonly caused by lightning, accidental short circuit, loose connection, starting of large motors (or air-conditioners) or abnormal use of the AC mains. In sensitive and critical applications, such as semiconductor material processing and medical operation, voltage sags may result in serious problems. In order to tackle this problem, the Semiconductor Equipment and Materials International (SEMI) defined, in 1996, a voltage sag immunity standard, known as SEMI F47-0200 [1], for semiconductor processing equipment manufacturers to conform to. Equipment compliant to this standard must have the specified immunity characteristics against voltage sags without the use of batteries. Based on the experience learned, the standard was redefined, in 2006, as SEMI F47-0706 [2]. It is expected that new semiconductor processing equipment will be designed to be compliant to the new standard. It is also likely that the SEMI F47-0706 requirement will be extended to other application areas. This paper describes the design of voltage sag compensators which can be operated in conjunction with a piece of equipment for SEMI F47 compliance. The voltage sag compensators described can provide sine-wave AC backup power to enable electronic equipment to meet the SEMI F47-0706 standard and to tolerate 100% momentary loss of AC mains voltage.