Abstract
On an RF driven inductively coupled plasma (ICP) torch device for thermal spraying, a measurement system based on voltage and current probes was installed on the transmission line between the matching system and the ICP torch to measure the input impedance of the RF coil. The amplitude and phase difference of voltage and current probes signals are measured by oscilloscope. So the intensity of input impedance of the coil can be calculated. In addition, the input power was used to extract the phase to calculate the input impedance. The optimized coil input impedance was used to evaluate RF ICP coupling characteristics, to improve coatings fabrication process.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
