Impacts of Pulsing Schemes on the Endurance of Ferroelectric Metal–Ferroelectric–Insulator–Semiconductor Capacitors

Abstract

In this work, the impacts of various pulsing schemes on endurance are comprehensively investigated. Trapezoidal and triangular waveforms are considered in endurance cycling tests. For endurance cycling with the trapezoidal waveforms, different rising time (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">r</sub> )/falling time (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">f</sub> ), e.g., 0.05– <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$5 \mu \text{s}$ </tex-math></inline-formula> , with a fixed pulse width (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">width</sub> ) and different pulse width (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">width</sub> ), i.e., 0- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$10 \mu \text{s}$ </tex-math></inline-formula> , with fixed rising time (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">r</sub> )/falling time (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">f</sub> ) are used. As for the endurance cycling with the triangular waveforms, the frequencies are ranged from 1 kHz to 1 MHz. The results indicate that a shorter rising time (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">r</sub> )/falling time (T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">f</sub> ) results in a completely different endurance characteristic, and a longer T <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">width</sub> leads to an earlier breakdown. Furthermore, the higher frequency of the triangular waveform results in a larger remnant polarization (2Pr) after endurance cycling. Overall, the endurance is highly dependent on the pulsing schemes, suggesting that a standardized methodology for the endurance evaluation is necessary for fair benchmarks and qualification of the ferroelectric-based technologies.