Abstract
This paper discusses loss of on-chip transmission-line in terahertz region. Above 100 GHz, modeling of on-chip transmission-line is an important issue. We evaluate the impact of eddy current and anomalous skin effect by a field solver. Simulation results show that eddy current in dummy fills has higher impact of 10% on transmission-line loss. Anomalous skin effect is not negligible, but its impact is about 5% at 100 GHz.
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