Abstract
A metal-ferroelectric-metal (MFM) capacitor was fabricated to investigate the effect of the rate-of-change of temperature in the rapid thermal annealing (RTA) process on the physical properties of the MFM capacitor’s ferroelectric layer [lead zirconate oxide (PZT)]. Remnant polarization (2 × Pr) is measured and monitored while performing the RTA process at 500 °C–700 °C. It turned out that, for a given target/final temperature in the RTA process, 2Pr of the ferroelectric layer decreases with a higher rate-of-change of temperature. This can provide a way to adjust the properties of the PZT layer, depending on the RTA process condition (i.e., using various rate-of-changes of temperature) for a given final/target temperature.
Highlights
Unlike conventional dielectric materials, ferroelectric materials have the property of maintaining electrical polarization without an external voltage
Pb(Zr1-x Tix )O3 (PZT) has been mainly used in Ferroelectric Random Access Memory (FeRAM), Pyroelectric Infrared (IR) Sensors, Surface Acoustic Wave (SAW) devices, and so on [1,2,3,4,5]
Ferroelectric films are widely used in electronics, and their properties vary greatly depending on synthesis conditions, the thickness of a ferroelectric layer, substrate/electrode materials on the top/bottom of the ferroelectric layer, and so on [8,9,10,11,12,13,14,15,16]
Summary
Ferroelectric materials have the property of maintaining electrical polarization without an external voltage. Based on this unique characteristic, they have been widely used in electronics. In the previous studies [17,18], it was investigated that the hysteresis of the polarization characteristic was increased at a higher annealing temperature. Afterwards, a follow-up study was done to investigate the dependence of the characteristics of a Pt/PZT/Pt capacitor on various rapid thermal annealing (RTA) temperatures. Two different conditions on how to increase RTA temperature were suggested and set up; the target RTA temperatures were set/chosen in the range of 500 ◦ C to 700 ◦ C by 100 ◦ C.
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