Abstract
The performance of a cavity-free micro thermoelectric generator (TEG) consisting of Si nanowires (Si-NWs) is investigated in this research. In the cavity free structure, one side of TEG is heated by a structure of a metal overlayer, called the Heat Guide (HG), to supply heat selectively to specific microregions within the device. Thus, heat energy flows in the perpendicular direction, which forms steep a temperature gradient in the NWs. However, the performance can be varied by varying the thickness of the HG. In this work, the impact of the HG structure of an integrated TEG upon the power generation performance was experimentally demonstrated. Higher metal HG thickness and thick interlayer dielectric (ILD) thickness show higher power generation performance with the integrated device.
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