Abstract
We have clarified the effects of activation annealing temperature on the negative bias temperature instability (NBTI) and time-dependent dielectric breakdown (TDDB) lifetime improvement of HfSiON/TiN gate stack p-type metal–oxide–semiconductor field effect transistors. Higher-temperature annealing is effective for the improvement in NBTI and TDDB lifetime. This is due to the Si substrate oxidation occuring during the high-temperature annealing, resulting in interface defect state reduction. Annealing is also effective for reducing threshold voltage with consequential improvement in device performance.
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