Abstract
This paper addresses the problem of the origin of majority and minority carriers' substrate currents in MOS devices. In particular, we present a critical analysis of published and original tunneling experiments by means of a novel, physically based model of impact ionization and hot carrier photon emission and re-absorption in the substrate. The model explains some relevant features of substrate minority carrier currents in saturated nMOSFETs, and provides a better understanding of the origin of substrate currents in tunneling MOS capacitors.
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