Abstract

This study introduces an array of semiconductor oxide single nanowires fabricated using advanced semiconductor processing techniques, including electron beam lithography and thin-film deposition, which is well-suited for large-scale nanowire integration. A four-channel nanowire array consisting of tin oxide (SnO2), indium oxide (In2O3), ferric oxide (Fe3O4), and titanium oxide (TiO2) was developed. As a proof of concept, we converted the response curves of the sensor array to heat maps, enabling comprehensive feature representation. The fabricated electronic nose (E-nose) was utilized to detect three types of volatile organic compounds (VOCs), with the results visualized in a heat map format. Additionally, the performance of each individual sensor was quantitatively studied, highlighting the array's potential for enhanced gas detection and analysis. To further illustrate the interaction between gas molecules and the nanowires, we visualized the gas response results by mapping the sensor's signal changes. These visualizations provide a clear representation of how different gas molecules interact with specific nanowires. For example, the heat maps reveal distinct response patterns for each type of VOC, allowing for the identification and differentiation of gases based on their unique signatures. This visualization technique not only enhances the understanding of gas-nanowire interactions but also demonstrates the effectiveness of the E-nose in distinguishing between various VOCs. The SnO2 nanowire gas sensor showed enhanced gas response compared to other materials. The SnO2 and TiO2 gas sensors showed enhanced response (62 and 56 s) and recovery times (100 and 37 s).

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