Abstract

Scanning transmission electron microscopy (STEM) is the most widespread adopted tool for atomic scale characterization of two-dimensional (2D) materials. However, damage free imaging of 2D materials with electrons has remained problematic even with powerful low-voltage 60 kV-microscopes. An additional challenge is the observation of light elements in combination with heavy elements, particularly when recording fast dynamical phenomena. Here, we demonstrate that 2D WS2 suffers from electron radiation damage during 30 kV-STEM imaging, and we capture beam-induced defect dynamics in real-time by atomic electrostatic potential imaging using integrated differential phase contrast (iDPC)-STEM. The fast imaging of atomic electrostatic potentials with iDPC-STEM reveals the presence and motion of single sulfur atoms near defects and edges in WS2 that are otherwise invisible at the same imaging dose at 30 kV with conventional annular dark-field STEM, and has a vast speed and data processing advantage over electron detector camera based STEM techniques like electron ptychography.

Highlights

  • Two-dimensional materials are a hot topic of research for their large potential in future applications by virtue of their reduced dimensions and tunable properties

  • The two selected regions (Fig. 1a–d and e–h) contain various elements and defects: W, S2, VW, VS and V2S. All of these features are present in the atomic electrostatic potential images captured using integrated differential phase contrast (iDPC)-Scanning transmission electron microscopy (STEM), with clearly distinguishable contrast between S2, VS and V2S, matching quantitatively with image simulations (ESI, Fig. S2†)

  • We have demonstrated that the image quality of annular dark-field (ADF)-STEM deteriorates under these conditions, whereas atomic electrostatic potential imaging remains of high quality due to the inherent high sensitivity and noise suppression property of iDPC-STEM

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Summary

Introduction

Two-dimensional materials are a hot topic of research for their large potential in future applications by virtue of their reduced dimensions and tunable properties. We observe beam-induced radiation damage and defect dynamics in semiconducting 2D WS2 by recording atomic electrostatic potential movies with iDPC-STEM using a primary electron energy of 30 keV.

Results
Conclusion
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