Abstract

N-type silicon doped with gold and lithium was investigated by Electron Paramagnetic Resonance (EPR) and Deep Level Transient Spectroscopy (DLTS), using two sets of samples with different defect concentrations of both gold and lithium. Photoluminescence (PL) on both sets of samples allowed to correlate the results of EPR and DLTS measurements. It is shown that the gold–lithium donor state, Au2––(Li+)3, with trigonal symmetry is most likely the origin of the well known DLTS level L1 at EC – 0.41 eV.

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