Identification of Burgers vectors of dislocations in monoclinic β-Ga2O3 via synchrotron x-ray topography

Abstract

Dislocations are major structural defects in semiconductor materials, and they have negative impacts on the performance and reliability of electronic devices. The Burgers vector (b→) of a dislocation is one of the most important characteristics that determines its behavior in an operating device. In this study, we used synchrotron x-ray topography (XRT) to perform systematic observations of dislocations in β-Ga2O3, which is a promising wide-bandgap semiconductor for power device applications. By applying the g→⋅b→ invisibility criterion to dislocation contrasts in XRTs taken at multiple reciprocal lattice vectors g→, we identified 12 types of Burgers vectors, including 11 types theoretically predicted by Yamaguchi et al. [Superlattice Microst. 99, 99 (2016)] and b→=⟨100⟩. Some of these Burgers vectors, such as b→=⟨101¯⟩,12⟨132⟩,12⟨13¯2⟩,⟨001⟩, and ⟨100⟩, were confirmed experimentally for the first time.