Abstract
Interface state density distributions and hole capture cross sections have been determined as a function of the energy for MOS structures made with anodic oxides on p-type GaSb by the ICTS (isothermal capacitance transient spectroscopy) technique. The interface state density increases towards the band edge from 3×1011 to 1×1012/cm2eV in the energy range of 0.3 to 0.03 eV above the valence band.
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