Hydrogenated Amorphous Silicon Photodiode Technology for Advanced CMOS Active Pixel Sensor Imagers

Abstract

ABSTRACTAmorphous silicon photodiode technology is a very attractive option for image array integrated circuits because it enables large die-size reduction and higher light collection efficiency than c-Si arrays. We have developed a photodiode array technology that is fully compatible with a 0.35νm CMOS process to produce image sensors arrays with 10-bit dynamic range that are 30% smaller than comparable c-Si photodiode arrays. The VGA (640x480), array demonstrated here uses common intrinsic and p-type contact layers, and makes reliable contact to those layers by use of a monolithic transparent conductor strap tied to vias in the interconnect. The work presented here will discuss performance issues and solutions that lend themselves to cost-effective high-volume manufacturing. The various methods of interconnection of the diode to the array and their advantages will be presented. The photodiode dark leakage current density is about 80 pA/cm2, and its absolute quantum efficiency peaks about 85% at 550 nm. The effect of doped layer thickness and concentration on quantum efficiency, and the effect of a-Si:H defect concentration on diode performance will be discussed.