Hydrogen Incorporation in MPCVD Nanocrystalline Diamond Films During the Deposition Process

Abstract

AbstractHydrogen incorporation is studied in two Microwave Plasma CVD nanocrystalline diamond films deposited with prolongated BIAS or not during the growth step. The hydrogen content and bonding forms are analysed by Secondary Ion Mass Spectrometry, Raman and Fourier Transformer Infrared Spectroscopy. Our results show a high hydrogen concentration up to 3.1021 cm-1, as expected in nanocrystalline diamond, and in good agreement with the sp2 phase rate measured by Raman spectroscopy . The FTIR spectra exhibit two sharp peaks at 2850 and 2920 cm-1 and show that a fraction of hydrogen is bonded to sp3 CH2 groups. Hydrogen desorption experiments are performed to analyse the local structure modification of the diamond films.