Abstract
We have utilized the detection of α-particles from the 6.46 MeV 19F resonance nuclear reaction 1H( 19F, αγ) 16O instead of measuring the γ-yield to profile the hydrogen concentration versus depth in hydrogen containing materials. A special particle filter was prepared to make the α-particle energy monoenergetic and to eliminate the recoiled particles and the scattered particles. The depth resolution and sensitivity were evaluated from the analyses of a polyester film and H-implanted silicon. Advantages of this method include: (1) the small space required for the detector arrangement, (2) easy utilization of a satisfactory current of highly-charged 19F ions from a small electrostatic tandem accelerator, (3) a good sensitivity useful for hydrogen depth profiling, even though this cross section is one-fifth that of the 19F 16.5 MeV resonance for 1H( 19F, αγ) 16O and one-third that of the 15N 6.44 MeV resonance for 1H( 15N, αγ) 12C, and (4) a maximum probing depth deep enough to be useful.
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