Abstract
A method for quantitative analysis of hydrogen distribution in 3D has been developed using the elastic recoil detection analysis (ERDA) technique in conjunction with a nuclear microprobe. 2–3 MeV alpha particles, focused down to 2–5 μm, were applied at incident angles of 10–15° to the sample surface. Using an absorber placed in front of surface barrier (SB) detector in order to stop forward-scattered alpha particles, we have achieved a hydrogen detection limit of about 0.1 at.% and a depth resolution of about 80–100 nm. The technique was applied simultaneously with Rutherford backscattering spectrometry (RBS) to measure and image the hydrogen distribution in thin films and solid state bulk materials.
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