Abstract
A hydrocarbon ablator was uniformly deposited by means of laser-induced chemical vapor deposition (CVD) onto a spherical glass microsphere target, which was levitated by a viscous gas jet flow. The maximum deposition rate was 18.4 nm/min and the uniformity of the coating layer was 98%. The deposition rate was independent of the back pressure ranging from 1×10−2 to 2×104 Pa. The deposition rate increased with the flow rate of the coating gas and with the laser intensity irradiating the microsphere. Optimum condition of the gas flow for stable levitation is also suitable for laser-CVD coating. These characteristics are preferable to coatings on future targets of larger sizes. Characterizations of the coating layer obtained in this work with a scanning electron microscope, a contact x-ray microradiograph, and an optical interference microscope are presented.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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