Abstract
We demonstrate vertical integration of nitride-based blue/green micro-light-emitting diodes (µLEDs) stacks with independent junctions control using hybrid tunnel junction (TJ). The hybrid TJ was gown by metal organic chemical vapor deposition (p + GaN) and molecular-beam epitaxy (n + GaN). Uniform blue, green and blue/green emission can be generated from different junction diodes. The peak external quantum efficiency (EQE) of the TJ blue µLEDs and green µLEDs with indium tin oxide contact is 30% and 12%, respectively. The carrier transportation between different junction diodes was discussed. This work suggests a promising approach for vertical µLEDs integration to enhance the output power of single LEDs chip and monolithic µLEDs with different emission colors with independent junction control.
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