Hybrid Simulation of Low Temperature Plasmas: A Brief Tutorial

Abstract

Modeling and simulation of low temperature plasmas is widely accepted as a useful tool from both physics and plasma reactor design points of view. Of the modeling approaches,hybridmodels strive to combine the predictability ofkineticmodels with the lower computational burden offluidmodels. This paper presents a brief tutorial of hybrid plasma modeling and representative simulation results using hybrid models. Whenever possible, these results are compared to kinetic and/or fluid simulations as well as experimental data.