Abstract
Several hybrid integrated As2S3 Mach-Zehnder interferometers with linear tapers and grating couplers have been successfully fabricated using magnetron sputtering on LiNbO3 substrate. It demonstrated how As2S3 waveguide can be integrated with the LiNbO3 waveguide to create a hybrid interferometer for use in chalcogenide photonics. The photo-induced changes in the group and effective index of the As2S3 waveguide were measured and compared to values reported for films prepared by thermal evaporation. These photo-induced phenomena are found to be different from those reported for As2S3 bulk glass and thermally evaporated As2S3 film.
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