Abstract
AbstractConsidering the complementary advantages and the similar machining system of both micro EDM and micro ECM, a hybrid process of SS-3D micro EDM and scanning 3D micro ECM is proposed for efficiently machining 3D microstructures without surface damage. The SS-3D micro EDM first removes most of 3D cavity material quickly, and then scanning 3D micro ECM realizes finishing machining for a damage-free 3D cavity. Machining system of the hybrid process is developed for verifying feasibility of the hybrid process. In this study, the hybrid process is orderly described in details including 3D model design, scanning paths planning, SS-3D micro EDM, and scanning 3D micro ECM. A pulsed power supply is also designed with the functional modules suitable for the hybrid process. The method of low-voltage electric contact is applied in replacing a tool electrode during the switching process from SS-3D micro EDM to scanning 3D micro ECM. Typical 3D micro cavities of square cavity and spherical crown cavity are machined to verify the feasibility of the hybrid process. The experimental results show that the hybrid process can improve the machining accuracy and efficiency.KeywordsHybrid processMicro electrochemical machining (ECM)Machining accuracy and efficiencyFinishing machiningDamage-free 3D cavity
Published Version
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