Abstract
3 μm thick lead zirconate titanate films were processed via a hybrid sol-gel-powder method on Inconel substrates for pressure sensor applications. Microstructure, ferroelectric, dielectric and piezoelectric properties are reported. It is shown that crack- free films with good high remnant polarization, and high effective piezoelectric coefficient, d 33 , could be processed. Sensor membranes were obtained from these film heterostructures, and their resonance behaviour was studied. Characterization of the membranes under different pressure conditions shows that the resonance frequency of the membrane decreases with increasing pressure. The FEM modelling using mechanic-acoustic coupling of PZT coated membranes agrees largely with this finding.
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