Abstract
The <i>Journal of Optical Microsystems</i> is a Gold Open Access journal that publishes cutting-edge research in all aspects of optical and photonic microsystems, from materials and fabrication of micro-optical and photonic components, through assembly and packaging, to systems and applications. Open access fees will be waived for all submissions through 2023.
Highlights
The correct reference list was provided by the authors, and the paper was republished on 28 December 2021
Downloaded From: https://www.spiedigitallibrary.org/journals/Journal-of-Optical-Microsystems on 14 Jan 2022 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use
Summary
Henning Schröder,a,b,* Julian Schwietering,b Gunnar Böttger,a and Vanessa Zamoraa,b aFraunhofer Institute for Reliability and Microintegration (IZM), Berlin, Germany bTechnical University of Berlin, Berlin, Germany
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
