Abstract
Hybrid laser technologies for deposition of thin films and basic schemes of combination of pulsed laser deposition (PLD) with magnetron sputtering and RF discharges or two lasers or three laser deposition systems are presented. Experiences with deposition of chromium doped diamond-like carbon (DLC) films for coating of prostheses are described. Layers of different chromium concentrations were prepared using hybrid systems (PLD + magnetron sputtering or by double PLD). Results of physical and mechanical characterization of film properties and biomedical tests of trivalent and toxic hexavalent chromium are given. Experiences with double laser deposition of DLC layers doped with silver are also mentioned.
Highlights
For creation of thin films of biomaterials, technologies like physical vapor deposition (PVD) (Physical Vapor Deposition) and CVD (Chemical Vapor Deposition) are used
In this contribution we introduce pulsed laser deposition (PLD) and basic hybrid PLD technologies, including applications for creation of diamond-like carbon (DLC) films doped with chromium or silver
Cr: DLC Prepared by Double PLD Deposition One KrF excimer laser was used for ablation of carbon and the second for ablation of chromium
Summary
For creation of thin films of biomaterials, technologies like PVD (Physical Vapor Deposition) and CVD (Chemical Vapor Deposition) are used. A frequently applied method in material research is the laser deposition method, usually called PLD. This method allows the fabrication of a wide scale of inorganic coatings and layers, including selected organic layers [1] [2]. The flexibility of PLD allows the deposition of multilayered structures in situ, in a single technological step. In this contribution we introduce PLD and basic hybrid PLD technologies, including applications for creation of DLC films doped with chromium or silver
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