Abstract

This contribution deals with conductive thin film gas sensors fabricated using laser technology. The principles of the pulsed laser deposition (PLD) technology is explained. Hybrid PLD systems, based on a combination of PLD and magnetron sputtering, PLD and RF discharges, and PLD with two laser targets are also presented. The growing layers can be modified by an ion beam. Organic films can be grown using the cryogenic MAPLE technology. Nanocrystalline and nanocomposite thin films for gas sensors can be deposited. Examples of layer fabrication and testing of layer properties for gas sensors are given.

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