Abstract

ZnO nanorod and nanobelt films were prepared on the Si substrates with comb type Pt electrodes by the vapor-phase transport method and their humidity sensitive characteristics have been investigated. It was found that the resistance of the films decreases with increasing relative humidity (RH). At room temperature (RT), resistance changes of more than four and two orders of magnitude were observed when ZnO nanobelt and nanorod devices were exposed respectively to a moisture pulse of 97% relative humidity. It appears that the ZnO nanomaterial films can be used as efficient humidity sensors

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