Abstract
The quest for smaller and more efficient humidity sensors is still on. Antimony trioxide thin films deposited by vacuum thermal evaporation onto heated glass substrates are analyzed as water vapor sensors, along with the study of their morpho-structural and electrical properties. Several substrate temperatures were set during the depositions, leading to films with significantly different electrical and humidity sensing features. Unusual increase of the electrical resistance of the films with temperature above 170 °C was noticed, representing the intermediate stage between extrinsic and intrinsic conductivity. In the extrinsic conduction region, the activation energy decreases exponentially with the substrate temperature during the initial depositions. The alternative current (AC), i.e. the electrical frequency characteristics versus humidity were also studied, allowing for the identification of the conduction mechanism within the samples, which is most probably short range hopping of charge carriers through trap sites, influences by the changing grain size and remanent amorphous phase within the films.
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