HRBS/channeling studies of ultra-thin ITO films on Si

Abstract

High-resolution Rutherford backscattering spectroscopy (HRBS)/channeling techniques have been utilized for a detailed characterization of ultra-thin indium tin oxide (ITO) films and to probe the nature of the interface between the ITO film and the Si(001) substrate. Channeling studies provide a direct measure of the lattice strain distribution in the crystalline Si substrate in the case of amorphous over layers. The measurements on DC magnetron sputtered ITO films have been carried out using the recently installed HRBS facility at the Centre for Ion Beam Applications (CIBA). The thickness of the ultra-thin (∼9.8nm) ITO films was calculated from the HRBS spectra having an energy resolution of about 1.4keV at the superimposed leading (In+Sn) edge of the ITO film. The films were near stoichiometric and the interface between ITO film and Si was found to include a thin SiOx transition layer. The backscattering yields from (In+Sn) of ITO were equal in random and channeling directions, thereby revealing the non-crystalline nature of the film. Angular scans of HRBS spectra around the off-normal [111] axis clearly showed a shift in the channeling minimum indicative of compressive strain of the Si lattice at the SiOx/Si interface. The observed strain was about 0.8% near the interface and decreased to values below our detection limits at a depth of ∼3nm from the SiOx/Si interface.