Abstract
As demonstrated by prominent applications using CO2 and NdYAG lasers, the use of these instruments in industrial fabrication lines is attractive because of the high flexibility caused by controllability of the beam position and beam parameters. Laser processes offer also rationalization and sometimes new concepts for innovative products. Excimer lasers, at this time preferably used in scientific environment will have a considerable potential in applications in the manufacturing of products, which need micromachining of polymers and ceramics or surface treatment or cleaning. However, the number of published examples for the use of excimer lasers in a large scale industrial manufacturing line is still very limited, especially if comparison is made to the number of publications, which describe fundamental research in this field and the visions for manufacturing applications herein.
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