Abstract
We experimentally demonstrate the optical transmission at 1550 nm of the fundamental slot modes (quasi-TM modes) in horizontal single and multiple slot waveguides and ring resonators consisting of deposited amorphous silicon and silicon dioxide. We demonstrate that the horizontal multiple slot configuration provides enhanced optical confinement in low index slot regions compared to a horizontal single slot structure with the same total SiO2 layer thickness by comparing their thermo-optic coefficients for the horizontal slot ring resonators. We show in these early structures that horizontal slot waveguides have low propagation loss of 6 approximately 7 dB/cm. The waveguide loss is mainly due to a-Si material absorption. The addition of a-Si/SiO(2) interfaces does not introduce significant scattering loss in a horizontal multiple slot waveguide compared to a horizontal single slot waveguide.
Highlights
Slot waveguides are a newly developed class of waveguides that has received significant attention and promise many applications in recent years [1,2,3,4]
We experimentally demonstrate the optical transmission at 1550 nm of the fundamental slot modes in horizontal single and multiple slot waveguides and ring resonators consisting of deposited amorphous silicon and silicon dioxide
We demonstrate that the horizontal multiple slot configuration provides enhanced optical confinement in low index slot regions compared to a horizontal single slot structure with the same total SiO2 layer thickness by comparing their thermo-optic coefficients for the horizontal slot ring resonators
Summary
Slot waveguides are a newly developed class of waveguides that has received significant attention and promise many applications in recent years [1,2,3,4]. The corresponding slot waveguide devices have virtually no fabrication constraints on slot thickness and can have very low scattering loss due to small surface or interface roughness for the fundamental slot mode, the quasi-TM mode. We have previously proposed multiple slot configurations in a horizontal slot waveguide to provide enhanced optical confinement in the low index slot region [6]. We experimentally demonstrate the low loss optical transmission at 1550 nm of the fundamental slot modes in horizontal single and multiple slot waveguides consisting of deposited amorphous silicon and silicon dioxide. We demonstrated that horizontal multiple slot waveguides provide enhanced optical confinement in the low index slot regions compared to that in horizontal single slot waveguides with the same SiO2 layer thickness. All slot waveguides in the following context are horizontal slot waveguides and only the quasi-TM mode properties are discussed
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