Abstract
Temperature dependence of electrical characteristics of SiO2 films doped with C, Si, and Ge were studied. The conductivity σ was found to vary with the temperature as lnσ∝T−1/4 over a wide temperature range, indicative of the conduction by the variable range hopping (VRH) mechanism. Since the previous optical studies for the same films indicate the existence of clusters in the films, it is very likely that the VRH through localized states associated with clusters dominates the conduction process, irrespective of the kind of group IV elements.
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