Abstract
Abstract Hard coatings play an important role in the surface finishing of tools, machine parts and even decorative applications because of their high hardness, good wear resistance, reduced friction coefficients, excellent corrosion resistance and, in part, nice colours. The originally used and still most often applied coatings TiN, TiC or Ti(C,N) and more recently CrN are modified by addition of “alloying” elements. Numerous investigations covered such effects and showed marked improvements of the properties and performance of multi-component hard coatings like (Ti,Al)N, (Ti,Cr)N, (Cr,Al)N etc. The present survey reports on the possibilities to deposit multi-component coatings by multi-source arrangements. This technique allows the combination of different processes and an easy variation of the chemical composition. An intense substrate movement, however, is strictly needed. The paper discusses the homogeneity of the elemental composition of PVD coatings deposited by multi-source arrangements with special emphasis on hard nitride coatings. Model calculations are proved by elemental depth profiling.
Published Version
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