Abstract
Hard nitride coatings find their use as protective layers on tools and machinery components and in the field of decorative applications. The interest is increasingly focused on ternary nitrides that are deposited by physical vapour deposition (PVD) techniques, often using a combination of multi-source arrangements with multifold sample rotations. In the present paper the elemental in-depth composition of multi-component hard coatings is discussed, presenting experimental results of (Ti,Pd)N, (Cr,Pd)N, (Ti,Cr)N, (Ti,Al)N, (Ti,Al,Zr)N and (Nb,Cr)N hard coatings. The AES and glow discharge optical spectroscopy in-depth analyses show an oscillating and more complex elemental distribution caused by the sample movement where a specific surface area passes different sources at different distances and different angles. These analyses agree with the results obtained by model calculations. © 1998 John Wiley & Sons, Ltd.
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