Abstract
Homoepitaxial NdBa 2Cu 3O 7− y (NBCO) thin films have been prepared on single-crystal NBCO(0 0 1) substrates in a cold-wall lateral-flow reactor by metalorganic chemical vapor deposition. X-ray diffraction showed that films grew c-axis oriented. The homoepitaxial film's crystallinity examined by Rutherford backscattering spectrometry was even better than the substrate's. Atomic force microscopy revealed that one-unit-cell-high step structure was maintained from the as-polished substrates to the homoepitaxial films. The variety of film surface morphology observed in atomic force microscope image was understood in terms of its dependence on the vicinal angle and the step direction of the substrates.
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