Homobuffer thickness effect on the background electron carrier concentration of epitaxial ZnO thin films

Abstract

Epitaxial ZnO thin films were grown on r-plane sapphire substrates using plasma-assisted molecular-beam epitaxy. ZnO homobuffer layers grown at a lower temperature were introduced to improve the crystallinity of the top ZnO thin films. Thicker homobuffer layers lead to better crystallinity of the subsequent epitaxial ZnO thin films due to the strain relaxation effect. Residual background electron carrier concentration in these undoped ZnO thin films first decreases, then increases as the buffer layer thickness increases from ∼1 to 30 nm, with a minimum electron concentration of ∼1×1017 cm−3 occurring in ZnO homobuffer of ∼5 nm. These results demonstrate that the optimized ZnO homobuffer thickness to achieve both good ZnO crystallinity and low residual electron concentration is determined by the relative electron carrier concentration ratios and mobility ratios between the buffer and epi-ZnO layers.