Abstract
High-density microwave plasma created and sustained by evanescent waves emitted from a holey plate has been studied. This source is called a holey-plate plasma source. Microwave power at 2.45 GHz is supplied from a coaxial cavity and then converted into an evanescent mode through the use of a holey plate. The plate is made from a 0.5 mm thick, 54 mm diam stainless steel sheet with 2.5 mm diam, 3.6 mm pitch holes, thus allowing high-density plasma to be generated near the surface of the plate. An evanescent electric field is produced from the cavity resonator to a plasma production chamber that is 54 mm in diameter. A detailed description of the plasma source and the plasma characteristics are presented in this article. The plasma density is 6.5×1011 cm−3 with an electron temperature of 3 eV at an argon gas pressure of 2 Pa.
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