Abstract
Quantitative microanalysis is based on empirical adjustment of simple models of electron-target interaction. The accuracy of analysis depends on measurements of X-ray emission from homogeneous well-characterized standard materials. As better standards and larger and faster computers become available, simplistic models can be replaced and the quality of adjustment improved. It is also possible to include some secondary processes such as excitation of X-rays by high-energy secondary electrons which were overlooked in the past.
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