High-speed LiDAR by multi-order laser beam steering with digital micromirror device (Conference Presentation)

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Laser beam steering technology is essential for modern consumer and scientific optical devices including displays, microscopy, and Light Detection and Ranging (LIDAR) systems. Along with mechanical and completely non-mechanical beam steering approaches, Micro Electro Mechanical Systems (MEMS) are emerging beam steering devices that are especially suitable for LIDAR systems due to their fast scan rate and large scan angle. A class of MEMS-based devices, the Digital Micromirror Device (DMD), has been demonstrated for beam steering too by synchronizing its mirror movement to laser pulse. The tilt movement of micromirrors synchronizes with multiple pulses from multiple laser sources that sequentially redirect the pulses to multiple diffraction orders within μs. Based on the beam steering principle, multi-beam and multi-pulse beam steering in single-chip DMD LIDAR architecture provides a pathway to fast distance range finding having over 1M samples/s scan rate by leveraging a commercially available DMD, laser diodes and drivers. As a proof of concept, 3.34kHz and 15 points of range finding is demonstrated by using three pulsed laser diodes operating at 905nm. Additionally, multi-pulse beam steering for 5 points with an increased scanning rate of 6.63kHz demonstrates further enhancement of the scanning speed. The approach opens up a pathway to achieve a LIDAR system with a scanning rate over 1M samples/s while leveraging a state of the art DMD and a moderate number of laser sources.