Abstract
In this paper, we present a time-of-flight LiDAR (Light Detection and Ranging) system built with MEMS (Micro Electro Mechanical System) scanner-based coaxial optical transceiver. The optical transceiver combined with coaxial optical system and an electromagnetic MEMS scanner operated at 1.2 kHz was developed to transmit, receive and steer beam. Based on this all-in-one optical transceiver, a compact time-of-flight LiDAR system with FOV (Field of View) of 20° and resolution of 0.2° was demonstrated. The accuracy of LiDAR system is about 5cm in 50m without averaging.
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