Abstract
We developed a high-spatial-resolution scanning X-ray fluorescence microscope (SXFM) with Kirkpatrick-Baez mirrors. As a result of focusing tests at 15 keV, the focused beam having a FWHM of 30 x 50 nm 2 was achieved. Additionally, the size was controllable within the wide range of 30 ~ 1400 nm merely by adjusting the X-ray source size. The observation of a fine test chart suggests that SXFM enables us to visualize the element distribution inside the pattern at a spatial resolution better than 30 nm. We applied the SXFM to observe intracellular elemental distributions at a single-cell level, so that we could acquire element distribution maps with a spatial resolution of sub-100 nm and lower detection limit of 0.01 fg.
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